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A Smart Active Phase-Change Micropump Based on CMOS-MEMS Technology.

Wenzui Jin¹, Yimin Guan², Qiushi Wang¹

¹School of Microelectronics, Shanghai University, Shanghai 201800, China.

Sensors (Basel, Switzerland)

|June 10, 2023

Summary

This study presents a novel active phase-change micropump using CMOS-MEMS technology. The developed micropump achieves a maximum flow rate of 22 µL/min, offering stable operation for microfluidic systems.

Keywords:

CMOS-MEMS active micropump phase-change micropump

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Area of Science:

Microfluidics
MEMS Technology
Phase-Change Phenomena

Background:

Integrating micropumps into microfluidic chips presents challenges.
Active micropumps offer advantages over passive ones due to integrated control systems and sensors.

Purpose of the Study:

To fabricate and investigate an active phase-change micropump using CMOS-MEMS technology.
To analyze the pumping mechanism and performance characteristics of the developed micropump.

Main Methods:

Fabrication of a micropump utilizing complementary metal-oxide-semiconductor-microelectromechanical system (CMOS-MEMS) technology.
Theoretical modeling to analyze the traveling phase transition effect.
Experimental validation of the micropump's performance under varying conditions.

Main Results:

The micropump features a simple design with a microchannel, heater elements, control system, and sensors.
A maximum flow rate of 22 µL/min was achieved at room temperature.
Long-term stable operation was demonstrated through optimized heating conditions.

Conclusions:

The developed active phase-change micropump is a viable solution for microfluidic applications.
CMOS-MEMS technology enables the creation of efficient and integrated micropumping systems.
Further optimization of heating conditions can enhance the micropump's performance and stability.