A Compact Piezo-Inertia Actuator Utilizing the Double-Rocker Flexure Hinge Mechanism

Area of Science:

• Micromechatronics
• Precision Engineering
• Actuator Technology

Background:

• Piezo-inertia actuators are crucial for microprecision applications due to their simple structure and control.
• Existing actuators often struggle to simultaneously achieve high speed, high resolution, and low velocity deviation.

Purpose of the Study:

• To develop a compact piezo-inertia actuator capable of high speed, high resolution, and low positive/negative velocity deviation.
• To analyze the performance characteristics, including load capacity, voltage, and frequency responses.

Main Methods:

• Design and fabrication of a novel piezo-inertia actuator utilizing a double rocker-type flexure hinge mechanism.
• Experimental testing of a prototype to evaluate its performance metrics.

Main Results:

• The actuator demonstrated good linearity in both positive and negative displacements.
• Achieved maximum velocities of 10.63 mm/s (positive) and 10.12 mm/s (negative) with a 4.9% speed deviation.
• Attained positioning resolutions of 42.5 nm (positive) and 52.5 nm (negative), with a maximum output force of 220 g.

Conclusions:

• The developed piezo-inertia actuator exhibits excellent output characteristics with minimal speed deviation.
• The double rocker-type flexure hinge mechanism enables simultaneous high-speed, high-resolution, and low-deviation performance for microprecision tasks.