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Self-Sensing of a Magnetically Actuated Prism
Pascal M Weber1, Ulrike Wallrabe1, Matthias C Wapler2
1Laboratory for Microactuators, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79085 Freiburg, Germany.
Abstract:
We demonstrate a method for self-sensing of a magnetically actuated prism that can be used, e.g., in a feedback-loop without the need of additional sensors. In order to use the impedance of the actuation coils as a measurement parameter, we first obtained the optimal measurement frequency that is well separated from the actuation frequencies and at the same time provides the best compromise between sensitivity to the position and robustness. We then developed a combined actuation and measurement driver, and correlated its output signal to the mechanical state of the prism using a defined calibration sequence. We demonstrate that we can reliably measure the state of each actuator and determine the tilt angle of the prism with an accuracy of ±0.1∘ in the polar angle over a range of ±4∘ and ±20 mrad in the azimuthal angle.
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