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Updated: Jun 17, 2026

Microfluidic Chips Controlled with Elastomeric Microvalve Arrays
Published on: October 1, 2007
Film-Shaped Self-Powered Electro-Osmotic Micropump Array
Toshiro Yamanaka1, Fumihito Arai1
1Department of Mechanical Engineering, School of Engineering, The University of Tokyo, Tokyo 113-8656, Japan.
Abstract:
This paper reports a new concept of a film-shaped micropump array for biomedical perfusion. The detailed concept, design, fabrication process, and performance evaluation using prototypes are described. In this micropump array, an open circuit potential (OCP) is generated by a planar biofuel cell (BFC), which in turn generates electro-osmotic flows (EOFs) in multiple through-holes arranged perpendicular to the micropump plane. The micropump array is thin and wireless, so it can be cut like postage stamps, easily installed in any small location, and can act as a planar micropump in solutions containing the biofuels glucose and oxygen. Perfusion at local sites are difficult with conventional techniques using multiple separate components such as micropumps and energy sources. This micropump array is expected to be applied to the perfusion of biological fluids in small locations near or inside cultured cells, cultured tissues, living organisms, and so on.
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