Higher order wavefront correction and axial scanning in a single fast and compact piezo-driven adaptive lens

We present a compact adaptive glass membrane lens for higher order wavefront correction and axial scanning, driven by integrated segmented piezoelectric actuators. The membrane can be deformed in a combination of rotational symmetry providing focus control of up to ± 6 m^-1 and spherical aberration correction of up to 5 wavelengths and different discrete symmetries to correct higher order aberrations such as astigmatism, coma and trefoil by up to 10 wavelengths. Our design provides a large clear aperture of 12 mm at an outer diameter of the actuator of 18 mm, a thickness of 2 mm and a response time of less than 2 ms.