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Stability control of high-speed magnetic levitation turbomolecular pumps with shock-excited disturbance

Shitong Wei1, Yun Le1, Jinxiang Zhou1

  • 1School of Instrumentation Science and Optoelectronics Engineering, Beihang University, Beijing 100191, China.

ISA Transactions
|August 16, 2023
PubMed

Keywords:
Active magnetic bearingMagnetic levitation turbomolecular pumpShock disturbance

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