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A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness
Xiangming Liu1,2, Shanhong Xia1,2, Chunrong Peng1,2
1State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Micromachines
|August 26, 2023
Summary
This study presents a novel micro-electro-mechanical system (MEMS) electrostatic field sensor. The sensor achieves high sensitivity and resolution by utilizing resonant frequency shifts caused by electrostatic stiffness perturbation.
Area of Science:
- Micro-electro-mechanical systems (MEMS)
- Sensor technology
- Applied physics
Background:
- Traditional electrostatic field sensors face challenges with feedthrough interference from driving voltages.
- Resonant frequency output offers a potential solution to mitigate such interference.
- MEMS technology enables miniaturization and high-performance sensor development.
Purpose of the Study:
- To propose and validate a highly sensitive and high-resolution MEMS electrostatic field sensor.
- To leverage electrostatic stiffness perturbation for improved sensing accuracy.
- To utilize resonant frequency as the primary output signal, eliminating feedthrough interference.
Main Methods:
- Theoretical modeling and analysis of the electrostatic field sensor's characteristics.
- Finite element simulation for design verification.
- Fabrication of a device prototype using Silicon on Insulator (SOI) process.
- Experimental testing under vacuum conditions.
Main Results:
- The sensor demonstrates high sensitivity of 0.1384 Hz/(kV/m).
- Achieved a resolution better than 10 V/m.
- Experimental results validate the theoretical model and simulation predictions.
Conclusions:
- The proposed resonant MEMS electrostatic field sensor effectively utilizes electrostatic stiffness perturbation.
- The sensor design successfully eliminates feedthrough interference by using resonant frequency as the output.
- The demonstrated performance metrics highlight the potential of this sensor for advanced electrostatic field measurements.
