Challenges of Electron Correlation Microscopy on Amorphous Silicon and Amorphous Germanium

Dražen Radić1, Martin Peterlechner1, Katharina Spangenberg1

  • 1Institute of Materials Physics, University of Münster, Wilhelm-Klemm-Str. 10, Münster, 48149 North Rhine-Westphalia, Germany.

Summary

Electron correlation microscopy of amorphous germanium and silicon revealed significant experimental artifacts. The study concluded that structural changes were primarily electron beam-driven, not due to self-diffusion at accessible temperatures.