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Topography involves measuring and mapping land elevations, natural features, and artificial structures to create accurate representations of the terrain. Topographic surveying relies on traditional and modern methods, each with distinct advantages and limitations.Traditional Surveying Methods:Transit stadia surveys and plane table surveys were widely used traditional surveying methods. These techniques relied on instruments like theodolites and stadia rods for measuring distances and angles,...
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Improved topography measurement with a high dynamic range using phase difference sensing technology.

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    Phase difference sensing technology (PDST) offers adjustable measurement ranges for topography. This advanced technique provides precise step height characterization crucial for micro-electromechanical systems (MEMS) processing.

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    Area of Science:

    • Metrology
    • Optical Sensing
    • Nanotechnology

    Background:

    • Topography measurement is critical for micro-electromechanical systems (MEMS) fabrication.
    • Existing phase difference sensing technology (PDST) requires optimized structures for adjustable measurement ranges and high resolution.

    Purpose of the Study:

    • To propose and evaluate two novel interference structures for PDST to achieve adjustable upper limits and high resolution.
    • To enable precise step height characterization for MEMS processing.

    Main Methods:

    • Development of a dual-wavelength system with a single Fabry-Perot (FP) cavity.
    • Implementation of a single-wavelength system with dual FP cavities.
    • Utilizing an elliptic fitting algorithm (EFA) to determine phase difference for step height measurement.

    Main Results:

    • The dual-wavelength system achieved adjustable measurement upper limits of 410 µm, 187 µm, or 108 µm with a 2.96% measurement error.
    • The single-wavelength system demonstrated a high measurement resolution of 3.47 nm but with a 5.38% measurement error.

    Conclusions:

    • Both proposed PDST systems effectively characterize step height for MEMS processing.
    • The dual-wavelength system offers adjustable measurement ranges, while the single-wavelength system excels in high resolution.