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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Power-efficient polarization-insensitive tunable microring filter on a multi-layer Si3N4-on-SOI platform.
Optics Letters
|September 14, 2023
Summary
We developed a novel tunable optical filter using dual-coupled microring resonators. This polarization-insensitive device offers low loss and high efficiency for optical communications.
Area of Science:
- Photonics and Optical Engineering
- Materials Science (Silicon Nitride/Silicon Platforms)
- Integrated Optics
Background:
- Existing optical filters often suffer from polarization dependence, high insertion loss, and limited tunability.
- Microring resonators (MRRs) offer compact solutions for optical filtering but require careful design for performance.
- Silicon nitride (Si3N4) on silicon-on-insulator (SOI) platforms provide a robust base for integrated photonic devices.
Purpose of the Study:
- To develop and demonstrate a non-duplicate polarization-diversity tunable bandpass optical filter.
- To leverage the bi-directional transmission of add-drop dual-coupled MRRs for enhanced filter performance.
- To improve the thermo-optic tuning efficiency and overall device characteristics for practical applications.
Main Methods:
- Utilized a multi-layer Si3N4-on-SOI platform with add-drop dual-coupled MRRs.
- Implemented compact Si3N4 MRRs with Euler-bends for reduced footprint and loss.
- Employed a suspended micro-heater design to enhance thermo-optic tuning efficiency.
Main Results:
- Achieved low fiber-to-fiber insertion loss of 4.3 dB (1.7 dB on-chip) and polarization-dependent loss < 0.5 dB.
- Demonstrated high extinction ratio (> 30 dB) and low differential group delay (< 2.5 ps).
- Experimentally validated a wavelength tuning range of ~2 nm and a 3-dB bandwidth tuning range of 20 GHz with high tuning efficiency (33 pm/mW).
Conclusions:
- The developed filter is reconfigurable, polarization-insensitive, and exhibits low loss and crosstalk.
- The suspended micro-heater design significantly improves tuning efficiency (~7.5x higher than previous designs).
- This device shows strong potential for practical applications in optical communication and signal processing.

