Fabrication of freestanding photonic devices combining polymer films with microfabrication techniques and 3D printing

We report a technological concept for freestanding photonic elements based on metamaterials fabricated on polymer films by clean-room processes and framed using 3D printing. A spin-coated cyclic olefin copolymer (TOPAS) of variable thickness down to one micrometer was used as the substrate onto which metamaterials were fabricated using optical lithography. We demonstrate the possibility of applying a second TOPAS layer to protect the device or to allow for stacking another metamaterial layer. To obtain freestanding elements, frames were 3D printed directly on top of the metamaterial before lift-off from the carrier wafer. This ensured maintaining the flatness of the elements. Both the cleanroom process and the 3D printing enabled the design and manufacturing of elements in different sizes and shapes, e.g., to adapt to specific experimental set-ups and holder geometries or to be compatible with standard optical mounts. While TOPAS is transparent for wavelengths from UV to the far infrared, except for a few infrared absorption lines, we illustrate the concept with the simulation and manufacturing of THz band-pass filters. The performance of the fabricated filters was assessed using THz time-domain spectroscopy. The process is scalable to other wavelength ranges and has the potential for upscaling in manufacturing.