Reduced Defect Density in MOCVD-Grown MoS2 by Manipulating the Precursor Phase.

Larionette P L Mawlong1, Anh Tuan Hoang1, Jyothi Chintalapalli1

  • 1School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-ro, Seoul 03722, Republic of Korea.

PubMed
Summary

Researchers developed a new metal-organic chemical vapor deposition (MOCVD) method using liquid precursors to synthesize high-quality molybdenum disulfide (MoS2) films. This advancement improves electronic and optoelectronic devices by reducing defects and enhancing performance.