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Updated: Jul 15, 2025

Simulation, Fabrication and Characterization of THz Metamaterial Absorbers

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Thermal Reflow Simulation for PMMA Structures with Nonuniform Viscosity Profile.

Fedor Sidorov¹, Alexander Rogozhin¹

¹Valiev Institute of Physics and Technology, Russian Academy of Sciences, 117218 Moscow, Russia.

|September 28, 2023

Summary

This study introduces a new simulation method for polymer thermal reflow, accurately modeling nonuniform viscosity in polymethyl methacrylate (PMMA) for advanced microfabrication. The approach enhances predictable reflow for complex 3D structures.

Keywords:

PMMA grayscale e-beam lithography nonuniform viscosity profile thermal reflow

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Last Updated: Jul 15, 2025

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Combining Microfluidics and Microrheology to Determine Rheological Properties of Soft Matter during Repeated Phase Transitions

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Published on: April 19, 2018

Area of Science:

Materials Science
Computational Modeling
Nanotechnology

Background:

Polymethyl methacrylate (PMMA) is widely used in microelectronics fabrication.
Accurate simulation of thermal reflow is crucial for controlling 3D structure formation.
Existing models often overlook the impact of nonuniform viscosity in exposed PMMA.

Purpose of the Study:

To develop a novel numerical approach for simulating the thermal reflow of e-beam-exposed PMMA.
To incorporate the nonuniform viscosity profile of PMMA into surface evolution modeling.
To validate the simulation method for predicting reflow in complex microstructures.

Main Methods:

Utilized numerical "soapfilm" modeling of surface evolution via the "Surface Evolver" software.
Calculated PMMA viscosity profiles by simulating molecular weight distribution using Monte-Carlo methods and empirical formulas.
Determined the relationship between PMMA viscosity and surface vertex mobility through analytical and numerical reflow simulations.

Main Results:

Established a precise, proportional relationship between the inverse mobility of PMMA surface vertices and PMMA viscosity.
Validated the "soapfilm" modeling approach against analytical and numerical simulations for uniform PMMA gratings.
Demonstrated the capability of the developed method to simulate thermal reflow in complex, nonuniform structures.

Conclusions:

The "soapfilm" modeling approach is highly applicable for simulating polymer thermal reflow, even with nonuniform viscosity.
The developed method enables predictable reflow, facilitating its use in 3D microfabrication processes.
This simulation technique offers a powerful tool for designing and optimizing micro/nanofabrication processes involving PMMA thermal reflow.