Fedor Sidorov

2PUBLICATIONS
1CO-AUTHORS
Powder and particle technologyMicroelectromechanical systems (MEMS)
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Publications (2)

|Oct 26, 2024
A Model for Dry Electron Beam Etching of Resist.

Fedor Sidorov, Alexander Rogozhin

|Sep 28, 2023
Thermal Reflow Simulation for PMMA Structures with Nonuniform Viscosity Profile.

Fedor Sidorov, Alexander Rogozhin

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Frequent Collaborators

2 joint publications

Alexander Rogozhin