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Characterization of Thermal Transport in One-dimensional Solid Materials
Published on: January 26, 2014
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Lock-in photothermal method for in-plane thermal diffusivity measurements using arrayed temperature sensors on
Felix Jiang1,2, Meguya Ryu2,3, Vivek Pachauri1
1Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstraße 18-24, Aachen 52074, Germany.
The Review of Scientific Instruments
|September 29, 2023
Summary
A new device measures the in-plane thermal diffusivity of silicon nitride (SiNx) membranes using a lock-in photothermal method. Results show nanoscale geometry significantly reduces thermal diffusivity compared to bulk material.
Area of Science:
- Materials Science
- Nanotechnology
- Thermal Physics
Background:
- Accurate measurement of thermal properties is crucial for nanoscale materials.
- Silicon nitride (SiNx) membranes are used in various microelectronic and photonic applications.
- Understanding in-plane thermal transport in thin films is essential for device performance.
Purpose of the Study:
- To develop a device for measuring the in-plane thermal diffusivity of SiNx membranes.
- To investigate the influence of surrounding environment (air/vacuum) on thermal diffusion.
- To analyze the effect of nanoscale geometry on thermal transport properties.
Main Methods:
- Development of a device with a line- or spiral-shaped temperature sensor array on a SiNx membrane.
- Application of the lock-in photothermal method for temperature measurements.
- Analysis of 2D heat diffusion using the quadrupole method and a 1D fin approximation.
Main Results:
- The study successfully determined the in-plane thermal diffusivity of SiNx membranes.
- 2D thermal diffusion was influenced by both environmental heat exchange and parallel conduction in air.
- Measured thermal diffusivity values were significantly lower than bulk SiNx, attributed to nanoscale confinement effects.
Conclusions:
- The developed photothermal method is effective for measuring thermal diffusivity over a wide frequency range (50-1000 Hz).
- Nanoscale geometry significantly impacts thermal transport in SiNx membranes.
- The findings provide valuable insights into the thermal behavior of thin-film materials for device applications.
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