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Thermal Measurement Techniques in Analytical Microfluidic Devices

Thermal Measurement Techniques in Analytical Microfluidic Devices

Published on: June 3, 2015

Detection of dynamic temperature modulation using a thermal scanning probe lithography (t-SPL) system.

M Ryu¹, F Könemann², S Kamegaki³

¹National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8563, Japan.

The Review of Scientific Instruments

|April 8, 2025

Summary

This study validates nano-heating for measuring nanoscale thermal properties. Using thermal scanning probe lithography (t-SPL), researchers accurately determined thermal diffusivity in confined volumes.

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Area of Science:

Materials Science
Nanotechnology
Thermal Physics

Background:

Nanoscale thermophysical property measurements traditionally rely on localized sensing.
Localized heating has been proposed as an alternative but lacks validation for nanoscale property determination.
Existing methods face challenges in achieving high spatial resolution for thermal property mapping.

Purpose of the Study:

To demonstrate and validate the measurement of thermal diffusivity in nanoscale-confined volumes using localized nano-heating.
To establish nano-heating as a viable alternative to nano-sensing for nanoscale thermophysical property characterization.
To achieve nanoscale spatial resolution (10-100 nm) in thermal property measurements.

Main Methods:

Utilized a thermal scanning probe lithography (t-SPL) system with a sharp tip for localized, periodic sample heating.
Employed a pre-fabricated micro-thermocouple to detect the sample's temperature response.
Applied the temperature wave analysis method to infer thermal diffusivity from frequency-dependent phase shifts.

Main Results:

Successfully measured thermal diffusivity within a nanoscale-confined volume.
Demonstrated that localized nano-heating achieves nanoscale spatial resolution (10-100 nm).
Validated the t-SPL system for nanoscale thermal property assessment.

Conclusions:

Nano-heating is a validated and effective method for nanoscale thermophysical property measurements.
The t-SPL technique offers an alternative approach to miniaturizing detector sensors for high-resolution thermal analysis.
This method provides a pathway for advanced characterization of materials at the nanoscale.