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Updated: Jul 13, 2025

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Design of Electrostatic Aberration Correctors for Scanning Transmission Electron Microscopy.

Stephanie M Ribet1,2,3, Steven E Zeltmann4,5, Karen C Bustillo3

  • 1Department of Materials Science and Engineering, Northwestern University, Evanston, IL 60208, USA.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|October 18, 2023
PubMed
Summary

This study introduces an electrostatic phase plate as a novel aberration corrector for scanning transmission electron microscopes (STEM). This device improves image resolution and enables new beam profiles for advanced microscopy applications.

Keywords:
4D-STEMaberration correctionphase platescanning transmission electron microscopysimulation

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