Development of submicron precision three-dimensional low cross-interference air-floating motion stage.

Area of Science:

• Mechanical Engineering
• Precision Engineering
• Mechatronics

Background:

• High-precision positioning systems are crucial for advanced manufacturing and measurement.
• Existing systems often face challenges with cross-interference and Abbe offset errors.
• The demand for submicron accuracy in three dimensions necessitates innovative stage designs.

Purpose of the Study:

• To design and fabricate a novel three-dimensional (3D) positioning system with submicron precision.
• To minimize cross-interference between motion axes in a 3D stage.
• To achieve high positioning accuracy and stability for precision applications.

Main Methods:

• Designed a 3D motion stage incorporating a coplanar structure to eliminate Abbe offset error.
• Utilized air-floating rails and sliders for X and Y stages, driven by ball screws and AC servo motors.
• Employed a piezoelectric motor for direct Z-axis drive and dual-loop control technology for high-precision motion.
• Implemented lateral structure and double rails for X and Y air-floating stages.

Main Results:

• The 3D air-floating motion stage achieved a stroke of 100 x 100 x 100 mm³.
• Demonstrated a repeated positioning accuracy better than 0.41 μm (k=2).
• Reported maximum cross-interference of 180 nm (X-stage) and 320 nm (Y-stage) at full stroke.

Conclusions:

• The developed submicron-precision 3D air-floating motion stage effectively minimizes cross-interference.
• The system exhibits excellent repeatability, stable running, and high straightness.
• This positioning system offers a viable solution for coordinate measuring machines, microlithography, and micromachining.