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Updated: Jul 12, 2025

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx
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Investigation of the Electrical Coupling Effect for Monolithic 3-Dimensional Nonvolatile Memory Consisting of a

Jong Hyeok Oh1, Yun Seop Yu1

  • 1ICT & Robotics Engineering, Semiconductor Convergence Engineering, AISPC Laboratory and IITC, Hankyong National University, 327 Jungang-ro, Anseong-si 17579, Gyenggi-do, Republic of Korea.

Micromachines
|October 28, 2023
PubMed
Summary

This study investigated monolithic 3D nonvolatile memory with feedback field-effect transistors (M3D-NVM-FBFETs). Thinner interlayer dielectrics enhance electrical coupling but require careful design for reliable memory operation.

Keywords:
electrical couplingfeedback field-effect transistormonolithic 3-dimensional integrationnonvolatile memory

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