A Systematic Study on the Processing Strategy in Femtosecond Laser Scribing via a Two-Temperature Model

Balancing quality and productivity, especially deciding on the optimal matching strategy for multiple process parameters, is challenging in ultrashort laser processing. In this paper, an economical and new processing strategy was studied based on the laser scribing case. To reveal the temperature evolution under the combination of multiple process parameters in the laser scribing process, a two-temperature model involving a moving laser source was developed. The results indicated that the peak thermal equilibrium temperature between the electron and lattice increased with the increase in the laser fluence, and the temperature evolution at the initial position, influenced by subsequent pulses, was strongly associated with the overlap ratio. The thermal ablation effect was strongly enhanced with the increase in laser fluence. The groove morphology was controllable by selecting the overlap ratio at the same laser fluence. The removal volume per joule (i.e., energy utilization efficiency) and the removal volume per second (i.e., ablation efficiency) were introduced to analyze the ablation characteristics influenced by multiple process parameters. The law derived from statistical analysis is as follows; at the same laser fluence with the same overlap ratio, the energy utilization efficiency is insensitive to changes in the repetition rate, and the ablation efficiency increases as the repetition rate increases. As a result, a decision-making strategy for balancing quality and productivity was created.