Anchor Loss Reduction in Micro-Electro Mechanical Systems Flexural Beam Resonators Using Trench Hole Array Reflectors

The quality factor of microelectromechanical resonators is a crucial performance metric and has thus been the subject of numerous studies aimed at maximizing its value by minimizing the anchor loss. This work presents a study on the effect of elastic wave reflectors on the quality factor of MEMS clamped-clamped flexural beam resonators. The elastic wave reflectors are a series of holes created by trenches in the silicon substrate of the resonators. In this regard, four different shapes of arrayed holes are considered, i.e., two sizes of squares and two half circles with different directions are positioned in proximity to the anchors. The impact of these shapes on the quality factor is examined through both numerical simulations and experimental analysis. A 2D in-plane wave propagation model with a low-reflecting fixed boundary condition was used in the numerical simulation to predict the behavior, and the MEMS resonator prototypes were fabricated using a commercially available micro-fabrication process to validate the findings. Notably, the research identifies that half-circle-shaped holes with their curved sides facing the anchors yield the most promising results. With these reflectors, the quality factor of the resonator is increased by a factor of 1.70× in air or 1.72× in vacuum.