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Anchor Loss Reduction in Micro-Electro Mechanical Systems Flexural Beam Resonators Using Trench Hole Array

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Summary

Elastic wave reflectors, specifically half-circle-shaped holes near anchors, significantly boost the quality factor of microelectromechanical systems (MEMS) resonators. This enhancement improves resonator performance in both air and vacuum environments.

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Area of Science:

  • Materials Science and Engineering
  • Mechanical Engineering
  • Electrical Engineering

Background:

  • The quality factor (Q) is a critical parameter for microelectromechanical systems (MEMS) resonators, directly impacting their performance.
  • Minimizing anchor loss is essential for enhancing the Q factor, driving research into novel resonator designs and fabrication techniques.

Purpose of the Study:

  • To investigate the efficacy of elastic wave reflectors in improving the quality factor of MEMS clamped-clamped flexural beam resonators.
  • To evaluate the impact of different reflector geometries, including square and half-circle shaped holes, on resonator Q factor.

Main Methods:

  • Numerical simulations using a 2D in-plane wave propagation model with low-reflecting boundary conditions were employed to predict resonator behavior.
  • Fabrication of MEMS resonator prototypes utilizing a standard micro-fabrication process.
  • Experimental analysis of fabricated resonators to validate simulation results and quantify Q factor improvements.

Main Results:

  • Half-circle shaped elastic wave reflectors, with curved sides oriented towards the anchors, demonstrated the most significant improvement in Q factor.
  • Resonators equipped with optimized half-circle reflectors achieved a Q factor enhancement of 1.70× in air and 1.72× in vacuum.
  • Comparison of different reflector shapes (squares and half-circles) revealed distinct effects on wave propagation and energy dissipation.

Conclusions:

  • Elastic wave reflectors, particularly strategically placed half-circle holes, are an effective method for mitigating anchor loss in MEMS resonators.
  • The study validates the use of numerical simulations and experimental fabrication for optimizing MEMS resonator performance.
  • The findings offer a pathway to developing higher-performance MEMS resonators for various sensing and actuation applications.