Recent progress on defect-engineering in ferroelectric HfO2: The next step forward via multiscale structural

Fengjun Yan1, Yao Wu1, Yilong Liu1

  • 1School of Integrated Circuits & Wuhan National Laboratory for Optoelectronics & Engineering Research Center for Functional Ceramics of the Ministry of Education, Huazhong University of Science and Technology, Wuhan 430074, China. dongw@hust.edu.cn.

Materials Horizons
|December 11, 2023
PubMed
Summary

Defect engineering enhances ferroelectricity in HfO2-based thin films for advanced electronics. This review covers defect-doping strategies, phase transitions, and future optimization of these promising materials.

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