Geometric error modeling and compensation for high precision composite optical measurement systems.

Area of Science:

• Optics
• Metrology
• Mechanical Engineering

Background:

• Composite optical measurement systems offer high accuracy, speed, and real-time inspection capabilities.
• Geometric errors in 3D space significantly impact measurement accuracy.
• Existing error modeling methods are inadequate for complex systems with multi-probes and multi-zooms.

Purpose of the Study:

• To develop a unified 3D volumetric error model for composite optical measurement systems.
• To implement an effective geometric error compensation method across the entire measurement range.
• To validate the accuracy and effectiveness of the proposed modeling and compensation techniques.

Main Methods:

• Established a unified 3D volumetric error model using multi-body system theory and geometric optics principles.
• Employed direct measurement methods for error verification.
• Implemented continuous spatial geometric error compensation.
• Validated results using a laser interferometer and standard measurement objects.

Main Results:

• The integrated geometric error of the system was reduced by 76.55%.
• The proposed error model and compensation method effectively improved system accuracy.
• The developed method demonstrated universality for various measurement system structures and motion forms.

Conclusions:

• The unified 3D volumetric error model and compensation method provide a novel solution for zoom measurement systems.
• The approach significantly enhances the accuracy of composite optical measurement systems.
• This method has broad applicability in the field of precision measurement.