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    This study introduces sparse wavefront sensing, measuring only 1% of a highly divergent wavefront using Shack-Hartmann sensors (SHSs). This enables high-throughput measurements beyond sensor limits.

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    Area of Science:

    • Optics and Photonics
    • Wavefront Sensing and Metrology

    Background:

    • Traditional wavefront sensors have dynamic range limitations.
    • High-throughput measurements are crucial for advanced optical systems.

    Purpose of the Study:

    • To develop a concept for sparse measurement and reconstruction of highly divergent wavefronts.
    • To enable measurements beyond the dynamic range of conventional wavefront sensors.

    Main Methods:

    • Direct wavefront measurement using sparse sampling.
    • Employing Shack-Hartmann sensors (SHSs) to measure a small fraction (approx. 1%) of the wavefront.
    • Reconstruction of the entire wavefront from sparse data.

    Main Results:

    • Successful reconstruction of a wavefront with 62° divergence.
    • Achieved a root-mean-square error of approximately 200 nm.
    • Demonstrated suitability for low-measurement-time applications.

    Conclusions:

    • Sparse wavefront sensing is effective for highly divergent wavefronts.
    • The proposed method extends measurement capabilities beyond sensor dynamic range.
    • This technique is valuable for high-throughput optical metrology.