Thermal Conductivity Gas Sensors for High-Temperature Applications.

Area of Science:

• Materials Science
• Sensor Technology
• Microfabrication

Background:

• High-temperature gas sensing requires robust sensor designs resistant to extreme conditions.
• Existing sensors face limitations like mechanical stress and oxidation at elevated temperatures.
• Micro-Electro-Mechanical Systems (MEMS) offer miniaturization and integration potential for advanced sensors.

Purpose of the Study:

• To develop a fast and flexible microfabrication method for thermal conductivity gas sensors.
• To create sensors capable of operating reliably at temperatures exceeding 900°C.
• To demonstrate the suitability of these sensors for high-temperature gas sensing applications.

Main Methods:

• Fabrication of microheater and package using glass-coated platinum wire.
• Utilizing laser micromilling and thick-film screen-printing for ceramic components.
• Integration into a MEMS device within a metal-ceramic package for surface-mount compatibility.

Main Results:

• Successful fabrication of a compact, miniaturized thermal conductivity gas sensor.
• Demonstrated suitability for gas sensing with parameters comparable to industrial standards.
• Sensors maintained functionality and material integrity at temperatures above 900°C in air.

Conclusions:

• The developed microfabrication method enables the production of high-performance, high-temperature gas sensors.
• The sensor design exhibits superior resistance to oxidation and mechanical stress compared to conventional technologies.
• This approach facilitates wider applications in thermal gas sensor prototyping and industrial use.