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Updated: Jul 16, 2026

Scanning-probe Single-electron Capacitance Spectroscopy
Published on: July 30, 2013
Influence of Measuring Circuit Parameters on the Characteristics of MIS-Capacitor Hydrogen Sensors
Nikolay Samotaev1, Boris Podlepetsky1, Maya Etrekova1
1Micro- and Nanoelectronics Department, National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), 115409 Moscow, Russia.
Abstract:
Using electrophysical models of MIS-capacitor gas-sensing elements, the influence of measuring circuit parameters on the metrological characteristics of hydrogen sensors was investigated. Recommendations for selecting optimal measurement circuit modes are provided, both in general and using sensor elements with a Pd-Ta2O5-SiO2-nSi structure as an example. This article presents the results of an analysis and comparative study of three methods for measuring the capacitance of MISC sensors: (a) the AC bridge with a balance indicator (ACB + BI), (b) the divider method (DM), and (c) the bridge method (BM). The advantages and disadvantages of each method for practical implementation in gas analytical instruments are discussed. Furthermore, experimental data on the long-term stability of MISC sensor characteristics are provided, including the sensor response to hydrogen and the zero-point drift.
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