Combination of Material Processing and Characterization Methods for Miniaturization of Field-Effect Gas Sensor.

Nikolay Samotaev1, Artur Litvinov1, Konstantin Oblov1

  • 1Micro- and Nanoelectronics Department, National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Kashirskoe Highway 31, 115409 Moscow, Russia.

Summary

This study presents a scalable technology for field-effect gas sensors, focusing on mechanical protection and thermal stabilization for reliable performance in ambient environments. These advancements are crucial for developing robust sensors for real-world applications, including hydrogen detection.