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Correction: Integrated silicon photonic MEMS

Niels Quack1,2, Alain Yuji Takabayashi1, Hamed Sattari1,3

  • 1École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland.

Microsystems & Nanoengineering
|January 25, 2024
PubMed

Keywords:
NEMSNanoscale devicesOther photonics

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