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In Situ Metallic Coating of Atom Probe Specimen for Enhanced Yield, Performance, and Increased Field-of-View
Tim M Schwarz1, Eric Woods1, Mahander P Singh1
1Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany.
Summary
Focused ion beam in situ coating of atom probe specimens with thin metal films enhances data quality and yield. This technique improves mass resolution and field-of-view, benefiting various material analyses.
Area of Science:
- Materials Science
- Analytical Chemistry
- Surface Science
Background:
- Atom probe tomography (APT) requires specimens <100 nm in diameter, which are fragile and reactive.
- Defects like notches and precipitates negatively impact APT yield and data quality.
- Previous conformal coatings were applied ex situ and lacked uniformity.
Purpose of the Study:
- To develop and demonstrate an in situ focused ion beam (FIB) method for applying conformal metal coatings to APT specimens.
- To evaluate the impact of in situ coating on APT specimen yield, data quality, and analytical performance.
- To assess the broad applicability of this technique across diverse materials.
Main Methods:
- Controlled in situ deposition of thin metal films (e.g., Cr) using a micromanipulator and FIB sputtering (Ga or Xe ions) immediately after specimen preparation.
- Application of coatings to both metallic and nonmetallic specimens.
- Analysis of coated specimens using APT.
Main Results:
- Significant increase in APT data quality and specimen yield.
- Improved mass resolution and an expanded effective field-of-view.
- Enabled visualization of the entire original specimen, including surface oxide layers.
Conclusions:
- In situ FIB coating is a facile and effective method to enhance APT analyses.
- The technique offers substantial improvements in data quality, yield, and analytical capabilities.
- This approach is highly attractive for widespread adoption in atom probe tomography.
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