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Coupled Micromachined Magnetic Resonators for Microwave Signal Processing.

Romolo Marcelli1, Andrea Lucibello1, Emanuela Proietti1

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This study presents integrated magnetic resonators for microwave filtering. Researchers developed micromachining techniques and validated results using ferromagnetic resonance, enabling tunable signal filtering applications.

Keywords:
magnetostatic wavesmicromachiningmicrowave filtersresonators

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Area of Science:

  • Microwave Engineering
  • Materials Science
  • Applied Physics

Background:

  • Integrated magnetic resonators are crucial for microwave signal filtering.
  • Magnetostatic wave (MSW) coupled resonators offer tunable filtering capabilities.
  • Existing research requires further exploration in fabrication and theoretical modeling.

Purpose of the Study:

  • To present the theory, micromachining technology, and experimental results of coupled integrated magnetic film-based resonators.
  • To detail technological advancements, circuit theory, and potential applications for tunable integrated coupled magnetic resonators.
  • To extend the understanding of magnetostatic wave coupled resonators.

Main Methods:

  • Analytical approach using magnetostatic wave approximation to derive coupling coefficients.
  • Micromachining employing hot phosphoric acid etching for resonator fabrication.
  • Circuit modeling and experimental validation using ferromagnetic resonance (FMR) technique.

Main Results:

  • Successfully derived coupling coefficients for adjacent resonators.
  • Demonstrated a viable micromachining process for fabricating integrated coupled resonators.
  • Presented circuit modeling and experimental data validating the resonator performance.

Conclusions:

  • The presented work offers a comprehensive approach to designing and fabricating tunable integrated coupled magnetic resonators.
  • The developed micromachining technology and theoretical framework enable advanced microwave signal filtering.
  • Future applications in tunable filters and integrated microwave devices are promising.