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A high aspect ratio surface micromachined accelerometer based on a SiC-CNT composite material.

Jiarui Mo1, Shreyas Shankar1, Roberto Pezone1

  • 1Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands.

Microsystems & Nanoengineering
|March 25, 2024
PubMed
Summary

This study introduces a novel silicon carbide (SiC) and carbon nanotube (CNT) composite for advanced microelectromechanical systems (MEMS). This SiC-CNT composite enables high aspect ratio surface micromachining for harsh environments.

Keywords:
Electrical and electronic engineeringNanoscale materials

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Microelectromechanical Systems (MEMS)

Background:

  • Silicon carbide (SiC) is ideal for MEMS in harsh environments but difficult to machine.
  • Existing micromachining methods limit the complexity of SiC MEMS devices.

Purpose of the Study:

  • To develop a new composite material for high aspect ratio (HAR) surface micromachining of SiC MEMS.
  • To overcome the limitations of bulk SiC micromachining.

Main Methods:

  • Grew a high aspect ratio carbon nanotube (CNT) array using a patterned catalyst.
  • Densified the CNT array by filling with amorphous SiC (a-SiC) via LPCVD.
  • Fabricated and tested a capacitive accelerometer using the SiC-CNT composite.

Main Results:

  • The SiC-CNT composite demonstrated compatibility with surface micromachining processes.
  • Electrical resistivity was found to be dominated by the CNTs.
  • Significant improvement in the mechanical properties (Young's modulus) of CNTs after a-SiC coating.

Conclusions:

  • The SiC-CNT composite is a viable alternative for fabricating complex MEMS devices for demanding applications.
  • The developed composite material enhances the performance and durability of MEMS devices.
  • Successful demonstration of a functional capacitive accelerometer validates the material's potential.