Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO3 Thin Film

Yushuai Liu1,2,3, Kangfu Liu1,2,3, Jiawei Li1,2,3

  • 1School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China.

Micromachines
|April 27, 2024
PubMed