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Operational Amplifiers01:17

Operational Amplifiers

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The operational amplifier, often referred to as an op-amp, is a multifaceted building block of a circuit. This electronic component functions like a voltage-controlled voltage source and can also be used to create a voltage- or current-controlled current source. The design of an operational amplifier enables it to execute mathematical operations when external components like resistors and capacitors are linked to its terminals. An op-amp has the capacity to sum signals, amplify a signal,...
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Updated: Jun 26, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Dual-Mode Solidly Mounted Resonator-Based Sensor for Temperature and Humidity Detection and Discrimination.

José Manuel Carmona-Cejas1, Teona Mirea1, Ricardo Hervás-García1

  • 1CEMDATIC-ETSI Telecomunicación, Universidad Politécnica de Madrid, 28040 Madrid, Spain.

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|May 11, 2024
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Summary

This study introduces a dual-mode solidly mounted resonator (SMR) sensor to distinguish humidity from temperature effects. The SMR sensor effectively decouples environmental factors, improving sensing accuracy for various applications.

Keywords:
AlNbulk acoustic wavehumiditysensorstemperature control

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Area of Science:

  • Materials Science
  • Sensor Technology
  • Physical Chemistry

Background:

  • Solidly mounted resonators (SMRs) offer high sensitivity, fast response, and low cost for sensing.
  • A key challenge for SMR sensors is cross-sensitivity to environmental factors like temperature and humidity.
  • Accurate environmental sensing requires methods to decouple these interfering factors.

Purpose of the Study:

  • To develop a method for discriminating humidity variations from general frequency response in SMR sensors.
  • To utilize a specifically manufactured dual-mode SMR to achieve this discrimination.
  • To demonstrate the reproducibility of the proposed method across different environmental conditions.

Main Methods:

  • Fabrication of a solidly mounted resonator (SMR) designed to operate in a dual-mode with two closely spaced resonances.
  • Characterization of the frequency response of both resonances under varying humidity and temperature conditions.
  • Analysis of the differential response of the two modes to isolate humidity effects from temperature effects.

Main Results:

  • The dual-mode SMR exhibited similar responses to humidity for both resonances (-1.94 kHz/(%RH) and -1.62 kHz/(%RH)).
  • Significant differences in temperature response were observed between the two modes (2.64 kHz/°C vs. 34.21 kHz/°C).
  • This differential response enabled straightforward decoupling of humidity and temperature influences.

Conclusions:

  • A dual-mode SMR sensor effectively distinguishes humidity variations from temperature fluctuations.
  • The proposed method allows for accurate humidity sensing by mitigating cross-sensitivity issues.
  • The sensor's performance is reproducible across a range of temperatures (-20 °C to room temperature).