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Related Concept Videos

Atomic Force Microscopy01:08

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Spatial Resolution(s) in Atom Probe Tomography.

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In Situ Pulsed Hydrogen Implantation in Atom Probe Tomography.

Jean-Baptiste Maillet1, Gerald Da Costa1, Benjamin Klaes1

  • 1Univ Rouen Normandie, INSA Rouen Normandie, CNRS, Normandie Univ, GPM UMR 6634, Av. de l'Université, 76800 Saint-Etienne-du-Rouvray, France.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|May 17, 2024
PubMed
Summary

This study introduces an in situ hydrogen charging method for atom probe tomography. The technique uses negative voltage nanosecond pulses to implant hydrogen, overcoming previous temperature control challenges.

Keywords:
atom probe tomographyatomic scale characterizationhydrogenimplantationstorage

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Area of Science:

  • Materials Science
  • Surface Science
  • Analytical Chemistry

Background:

  • Investigating hydrogen in atom probe tomography (APT) is challenging due to its properties and vacuum environment.
  • Existing methods like ex situ charging or high-temperature charging have limitations in temperature control.

Purpose of the Study:

  • To develop a novel in situ method for hydrogen charging in APT.
  • To overcome the limitations of existing hydrogen charging techniques for APT analysis.

Main Methods:

  • Modified an atom probe chamber for direct negative voltage nanosecond pulse application.
  • Applied low-pressure H2 gas with controlled parameters (pressure, pulse rate, amplitude).
  • Utilized electrodynamical simulations to predict implantation energy and depth.

Main Results:

  • Successfully implanted high doses of hydrogen (2-20 nm depth) in situ.
  • Demonstrated control over implantation energy (100-1,000 eV) via pulse parameters.
  • Validated theoretical implantation depth predictions with experimental results.

Conclusions:

  • The proposed in situ method offers a viable alternative for hydrogen charging in APT.
  • This technique simplifies specimen handling and improves temperature control during hydrogen implantation.
  • Enables more reliable and precise hydrogen analysis in materials using APT.