Domain Switching Characteristics in Ga-Doped HfO2 Ferroelectric Thin Films with Low Coercive Field

Yu-Chun Li1, Teng Huang1, Xiao-Xi Li1

  • 1State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China.

Nano Letters
|May 24, 2024
PubMed
Summary

Gallium doping in hafnium oxide (Ga-HfO2) films enables tunable coercive fields for advanced ferroelectric memory. This research optimizes Ga-HfO2 for high-speed, low-voltage device operation.

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