Domain Switching Characteristics in Ga-Doped HfO2 Ferroelectric Thin Films with Low Coercive Field
Yu-Chun Li1, Teng Huang1, Xiao-Xi Li1
1State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China.
Nano Letters
|May 24, 2024
Summary
Gallium doping in hafnium oxide (Ga-HfO2) films enables tunable coercive fields for advanced ferroelectric memory. This research optimizes Ga-HfO2 for high-speed, low-voltage device operation.
Area of Science:
- Materials Science
- Solid State Physics
- Nanotechnology
Background:
- Hafnium oxide (HfO2)-based materials are crucial for developing next-generation ferroelectric memory devices.
- Achieving high-speed and low-voltage operation in these devices requires precise control over ferroelectric properties, particularly the coercive field (Ec).
- Gallium (Ga) doping presents a potential strategy for modulating the ferroelectric behavior of HfO2 films.
Purpose of the Study:
- To investigate the effect of varying gallium doping concentrations on the ferroelectric properties of hafnium oxide films.
- To understand the relationship between Ga doping, film microstructure, and polarization switching mechanisms.
- To establish Ga-doping as a viable method for reducing the coercive field in HfO2-based ferroelectric memory.
Main Methods:
- Fabrication of gallium-doped hafnium oxide (Ga-HfO2) films using atomic layer deposition (ALD) with controlled HfO2/Ga2O3 cycle ratios.
- Characterization of ferroelectric properties, including the measurement of coercive field (Ec) at different Ga doping levels.
- Analysis of polarization switching dynamics, distinguishing between domain nucleation and propagation mechanisms.
Main Results:
- Ga-HfO2 films exhibited a tunable coercive field (Ec) ranging from 1.1 MV/cm to as low as 0.6 MV/cm with increasing Ga doping.
- The modulation of Ec is attributed to the interplay between domain nucleation and propagation speeds, influenced by Ga concentration.
- Higher Ga doping concentrations shifted the switching mechanism towards propagation dominance at lower electric fields.
Conclusions:
- Gallium is confirmed as an effective dopant for significantly reducing the coercive field in HfO2-based ferroelectric materials.
- The study provides critical insights into the domain dynamics governing polarization switching in doped ferroelectrics.
- This work offers a pathway for designing advanced HfO2-based ferroelectric memory with enhanced performance characteristics.
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