Modeling and Reliability Analysis of MEMS Gyroscope Rotor Parameters under Vibrational Stress

Vibrational environments can cause drift or changes in Micro-Electro-Mechanical System (MEMS) gyroscope rotor parameters, potentially impacting their performance. To improve the effective use of MEMS gyroscopes, this study introduced a method for evaluating the reliability of parameter degradation under vibration. We analyzed the working principle of MEMS gyroscope rotors and investigated how vibration affects their parameters. Focusing on zero bias and scale factor as key performance indicators, we developed an accelerated degradation model using the distributional assumption method. We then collected degradation data for these parameters under various vibration conditions. Using the Copula function, we established a reliability assessment approach to evaluate the degradation of the MEMS gyroscope rotor's zero bias and scale factor under vibration, enabling the determination of reliability for these parameters. Experimental findings confirmed that increasing stress levels lead to reduced failure times and increased failure rates for MEMS gyroscope rotors, with significant changes observed in the zero bias parameter. Our evaluation method effectively characterizes changes in the reliability of the MEMS gyroscope rotor's scale factor and zero bias over time, providing valuable information for practical applications of MEMS gyroscopes.