Structural optimization and flow field analysis of turbomolecular pump based on a new performance prediction

Kun Sun1,2, Haishun Deng3,4, Cheng Wang5

  • 1School of Mechatronics Engineering, Anhui University of Science and Technology, Huainan, 232001, Anhui, China. ksun@aust.edu.cn.

Scientific Reports
|June 3, 2024
PubMed

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