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Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II
Weidong Wang1, Yong Ruan2, Zaifa Zhou3
1School of Mechano-Electronic Engineering, Xidian University, Xi'an 710071, China.
Micromachines
|June 27, 2024
Abstract:
Microelectromechanical system (MEMS) sensors are a miniaturized sensor technology that integrates sensors with microelectronic components using microelectromechanical system manufacturing technology [...].

