GRU-ESO Strategy for a Distributed Coil Magnetically Levitated Planar Micromotor

Area of Science:

• Mechatronics and Control Systems
• Electromechanical Engineering
• Micro-manufacturing Technologies

Background:

• Traditional magnetic levitation planar micromotors exhibit limitations in controllability, travel range, interference resistance, and precision.
• These drawbacks hinder their application in advanced micro-positioning systems.
• Addressing these limitations is crucial for developing next-generation micro-devices.

Purpose of the Study:

• To propose a novel distributed coil magnetically levitated planar micromotor design.
• To develop an advanced control strategy for enhanced performance.
• To improve controllability, travel range, interference resistance, and precision of planar micromotors.

Main Methods:

• Structural design separating levitation and displacement to reduce system coupling.
• Theoretical analysis and system modeling of the distributed coil magnetic levitation planar micromotor.
• Development of a Gated Recurrent Unit (GRU)-Extended State Observer (ESO) control strategy.
• Integration of ESO for anti-interference and GRU for tracking accuracy.

Main Results:

• The structural design successfully reduced system coupling, enhancing controllability and displacement range.
• The GRU-ESO controller demonstrated significant improvements in tracking accuracy.
• The proposed system exhibited enhanced resistance to external interference.
• Experimental validation confirmed the reliability of the micromotor and the effectiveness of the control strategy.

Conclusions:

• The developed distributed coil magnetically levitated planar micromotor offers superior performance over traditional designs.
• The GRU-ESO control strategy effectively addresses limitations in controllability and precision.
• This advancement paves the way for more robust and accurate micro-positioning applications.