Amorphous Gallium Oxide-Based Crosstalk-Suppressing Solar-Blind Imaging Array Prepared by One-Step Method
Hanzhe Zhang1,2, Rui Zhu2,3, Zengxia Mei2,3
1Institute of Semiconductor Science and Technology, South China Normal University, Foshan 528225, P.R. China.
Abstract:
The solar-blind ultraviolet band presents a unique opportunity for low-background-noise detection due to limited atmospheric light transmission. Especially, with the ability to obtain size, shape and position information on the objects, the solar-blind image sensors are receiving increasing attention. However, because the inhibition of the crosstalk in crossbar arrays induces the complexity of the preparation process, rarely are applicable solar-blind UV imaging arrays reported. This work prepared an amorphous gallium oxide (a-Ga2O3)-based diode with a remarkable rectifier ratio of up to 106. Then an imaging array was prepared by one-step method in that the diodes working as the detection elements and the switching elements inhibiting crosstalk were simultaneously deposited. Moreover, a 2 × 2 crossbar array clearly demonstrates the inhibition of the crosstalk. This work presents a simple and cost-effective method for preparing applicable solar-blind imaging arrays that inhibits crosstalk, promoting the practical application of the Ga2O3-based solar-blind UV detectors.
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