An In-Run Automatic Demodulation Phase Error Compensation Method for MEMS Gyroscope in Full Temperature Range

The demodulation phase error will cause the quadrature error to be coupled to the rate output, resulting in performance deterioration of the MEMS gyroscope. To solve this problem, an in-run automatic demodulation phase error compensation method is proposed in this paper. This method applies square wave angular rate input to the gyroscope and automatically identifies the value of the demodulation phase error through the designed automatic identification algorithm. To realize in-run automatic compensation, the demodulation phase error corresponding to the temperature point is measured every 10 °C in the full-temperature environment (-40~60 °C). The relationship between temperature and demodulation phase error is fitted by a third-order polynomial. The temperature is obtained by the temperature sensor and encapsulated in the ceramic packages of the MEMS gyroscope, and the in-run automatic compensation is realized based on the fitting curve. The temperature hysteresis effect on the zero-rate output (ZRO) of the gyroscope is eliminated after compensation. The bias instability (BI) of the three gyroscopes at room temperature (25 °C) is reduced by four to eight times to 0.1°/h, while that at full-temperature environment (-40~60 °C) is reduced by three to four times to 0.1°/h after in-run compensation.