Real-Time Plasmonic Strain Sensors Based on Surface Relief Diffraction Gratings

Large-scale diffraction gratings were fabricated in surface relief on azobenzene thin films and transferred to flexible PDMS substrates using soft lift-off lithography. The PDMS gratings were strained along the grating vector axis and the resulting surface topography was analyzed using diffraction angle measurements, AFM imagery and surface plasmon resonance (SPR) spectra. All measurement methods exhibited a linear response in strain indicating the useability of these sensors in real-world applications. For SPR-based strain sensing, an increasing pitch and a decreasing modulation depth were observed with increasing strain. The SPR peak shifted by ~1.0 nm wavelength and the SPR intensity decreased by ~0.3 a.u. per percentage of applied strain. The tested PDMS samples retained their integrity even after multiple cycles of stretching and relaxation, making them a suitable strain sensor.