Fabrication and Plasmonic Characterization of Metasurfaces Patterned via Tunable Pyramidal Interference Lithography

Large-area metasurfaces were fabricated via a tunable pyramidal interference lithography (PIL) technique, which uses custom-built 2-faced, 3-faced, and 4-faced pyramidal prisms to create metasurfaces with customizable nano- and micro-scale surface feature periodicities. The 2-faced prism produced linear surface relief diffraction gratings, while the 3-faced prism produced metasurfaces with triangular lattices and the 4-faced prism produced metasurfaces with square lattices, all on azobenzene thin films. A double inline prism set-up enabled control over the metasurface feature periodicity, allowing systematic increase in the pattern size. Additional tunability was achieved by placing a prism inline with a lens, allowing precise control over the metasurface feature periodicity. A theoretical model was derived and successfully matched to the experimental results. The resulting metasurfaces were coated with gold and exhibited distinct surface plasmon resonance (SPR) and surface plasmon resonance imaging (SPRi) responses, confirming their functionality. Overall, this work establishes PIL as a cost-effective and highly adaptable metasurface fabrication method for producing customizable periodic metasurfaces for photonic, plasmonic, and sensing applications.