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Updated: Jun 15, 2025

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Field enhancement induced by surface defects in two-dimensional ReSe2 field emitters
Filippo Giubileo1, Enver Faella2, Daniele Capista3
1CNR-SPIN Salerno, via Giovanni Paolo II n.132, 84084 Fisciano, Italy. filippo.giubileo@spin.cnr.it.
Abstract:
The field emission properties of rhenium diselenide (ReSe2) nanosheets on Si/SiO2 substrates, obtained through mechanical exfoliation, have been investigated. The n-type conduction was confirmed by using nano-manipulated tungsten probes inside a scanning electrode microscope to directly contact the ReSe2 flake in back-gated field effect transistor configuration, avoiding any lithographic process. By performing a finite element electrostatic simulation of the electric field, it is demonstrated that the use of a tungsten probe as anode, at a controlled distance from the ReSe2 emitter surface, allows the collection of emitted electrons from a reduced area that furtherly decreases by reducing the tip-sample distance, i.e. allowing a local characterization of the field emission properties. Experimentally, it is shown that the turn-on voltage can be linearly reduced by reducing the cathode-anode separation distance. By comparing the measured current-voltage characteristics with the numerical simulations, it is also shown that the effective field enhancement on the emitter surface is larger than expected because of surface defects. Finally, it is confirmed that ReSe2 nanosheets are suitable field emitters with high time stability and low current fluctuations.

