Spectroscopic Analysis on Different Stacking Configurations of Multilayered MoSe₂

Transition metal dichalcogenides (TMDs) are drawing significant attention due to their intriguing photoelectric properties, and these interesting properties are closely related to the number of layers. Obtaining layer-controlled and high-quality TMD is still a challenge. In this context, we use the salt-assisted chemical vapor deposition to grow multilayered MoSe₂ flake and characterize it by Raman spectroscopy, second harmonic generation, and photon luminescence. Spectroscopic analysis is an effective way to characterize the stacking order and optoelectronic properties of two-dimensional materials. Notably, the corresponding mapping reflects the film quality and homogeneity. We found that the grown continuous monolayer, bilayer, and trilayer of MoSe₂ sheets with different stacking orders exhibit distinctive features. For bilayer MoSe₂, the most stable stacking configurations are the AA' and AB order. And the uniformity of the spectroscopy maps demonstrates the high quality of the stacked MoSe₂ sheets.