Related Experiment Video
Updated: Jun 12, 2025

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Automated detection and mapping of crystal tilt using thermal diffuse scattering in transmission electron microscopy
Mauricio Cattaneo1, Knut Müller-Caspary2, Juri Barthel3
1Ernst Ruska Centre (ER-C), Forschungszentrum Jülich GmbH, 52425 Jülich, Germany; 2nd Institute of Physics, RWTH Aachen University, 52074 Aachen, Germany.
This study introduces a new method using scanning transmission electron microscopy (STEM) to precisely measure local crystal orientation in materials. This technique enhances the quantitative analysis of crystalline specimens by accurately mapping crystallographic tilt and rotation.
Area of Science:
- Materials Science
- Crystallography
- Electron Microscopy
Background:
- Quantitative analysis of crystalline specimens using transmission electron microscopy (TEM) relies on accurate local crystal orientation.
- Determining precise crystal orientation is crucial for understanding material properties and behavior.
Purpose of the Study:
- To develop and validate a method for accurately determining local crystal orientation from momentum-resolved scanning TEM (STEM) data.
- To enable precise crystallographic tilt and in-plane rotation mapping in various materials.
Main Methods:
- Exploits momentum-resolved STEM data and geometric analysis of Kikuchi bands within diffraction patterns.
- Determines the center of the Laue circle to quantify local mistilt from major zone axes.
- Utilizes unit-cell averaged diffraction patterns from high-resolution STEM settings.
Main Results:
- Achieved an accuracy of approximately 0.1 mrad in simulation studies.
- Successfully implemented the method in automated software for experimental application.
- Generated orientation maps for high-Mn steel and a La0.7Sr0.3MnO3-SrTiO3 interface.
Conclusions:
- The developed method provides accurate and consistent crystallographic tilt mapping over large fields of view (>100 nm) with unit-cell resolution.
- This technique significantly improves the quantitative interpretation of TEM data for crystalline materials.
- The findings are applicable to diverse crystalline specimens, including advanced alloys and epitaxial thin films.
Related Concept Videos
Electron Microscope Tomography and Single-particle Reconstruction
Electron Tomography
Electron tomography can be performed either in TEM or STEM (scanning transmission...
X-ray Crystallography
Diffraction
Diffraction is the change in the direction of travel experienced by an electromagnetic wave when it encounters a physical barrier whose dimensions are comparable to those of the wavelength of the light. X-rays are electromagnetic radiation with wavelengths about as long as the distance between neighboring...
Transmission Electron Microscopy

