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Mengzhi Yan1, Junlei Zhao2, Jesper Byggmästar3
1State Key Laboratory of Precision Measuring Technology and Instruments, Laboratory of Micro/Nano Manufacturing Technology, Tianjin University, Tianjin 300072, China.
We developed an accurate algorithm to identify intrinsic defects in beta-gallium oxide (β-Ga2O3) using computational modeling. This method achieves over 95% accuracy, enabling real-time defect detection in simulations.
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