Quantitative Modeling of Nanopore Formation in 2D MoS₂ by Swift Heavy-Ion Irradiation

Swift heavy-ion irradiation provides a versatile route for nanostructuring two-dimensional (2D) materials, with potential applications ranging from membrane engineering to electronic and sensing technologies. Here, we combine high-resolution scanning transmission electron microscopy with atomistic simulations to demonstrate controlled nanopore formation in monolayer MoS₂, with pore sizes governed by stochastic energy transfer. By incorporating electron bunching, spatial straggling, and energy loss through escaping particles, our energy-transfer model quantitatively reproduces experimental pore size distributions and surpasses conventional stopping power predictions. These results deepen our understanding of ion-matter interactions in 2D systems and enable the controlled fabrication of functional nanostructures via ion irradiation.