Area Selective Atomic Layer Deposition for the Use on Active Implants: An Overview of Available Process Technology

Nicolai Simon1,2, Thomas Stieglitz2,3,4, Volker Bucher1

  • 1Institute for MicroSystems Technology (iMST), Faculty of Mechanical & Medical Engineering, Furtwangen University, D-78120, Furtwangen im Schwarzwald, Germany.

PubMed
Summary

Area-selective atomic layer deposition (ASD) enables defect-free semiconductor manufacturing and enhances active implants. This review explores ASD processes for medical applications, including biosensors and implantable electrodes.

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