Kinetically Tailored Chemical Vapor Deposition Approach for Synthesizing High-Quality Large-Area Non-Layered 2D
Jiha Kim1, Eunbin Son2, Yunseong Choi3
1Graduate School of Semiconductor Materials and Devices Engineering, Ulsan National Institute of Science and Technology, Ulsan, 44919, Republic of Korea.
Small (Weinheim an Der Bergstrasse, Germany)
|January 6, 2025
Summary
Researchers developed a kinetically tailored chemical vapor deposition (KT-CVD) method to synthesize large-area, non-layered 2D molybdenum nitride (MoN) thin films. This breakthrough enables scalable production of advanced 2D materials for novel device applications.
Area of Science:
- Materials Science
- Nanotechnology
- Chemical Engineering
Background:
- Non-layered 2D materials possess superior physicochemical properties compared to layered counterparts.
- The isotropic bonding in non-layered materials impedes lateral growth, complicating the synthesis of large-area films.
Purpose of the Study:
- To introduce a facile kinetically tailored chemical vapor deposition (KT-CVD) approach for synthesizing 2D non-layered materials.
- To overcome the challenges in lateral growth and enable large-area film fabrication of 2D molybdenum nitride (MoN).
Main Methods:
- Developed a KT-CVD method by precisely controlling nitrogen vapor pressure.
- Disrupted thermodynamically favored growth kinetics to promote lateral film expansion.
- Synthesized 2D molybdenum nitride (MoN) thin films with dimensions up to 1.5 cm x 1.5 cm.
Main Results:
- Achieved large-scale synthesis of continuous 2D MoN thin films.
- Successfully grew stable crystalline phases of MoN, including delta-MoN (δ-MoN) and gamma-Mo2N (γ-Mo2N).
- Demonstrated excellent surface-enhanced Raman scattering (SERS) and thermal stability for the synthesized δ-MoN.
Conclusions:
- The KT-CVD approach provides an effective strategy for scalable, high-quality synthesis of non-layered 2D materials.
- This advancement expands the fabrication possibilities and applications of devices utilizing non-layered materials.
- The synthesized MoN films show promise for applications requiring SERS and high thermal stability.


