Kinetically Tailored Chemical Vapor Deposition Approach for Synthesizing High-Quality Large-Area Non-Layered 2D

Jiha Kim1, Eunbin Son2, Yunseong Choi3

  • 1Graduate School of Semiconductor Materials and Devices Engineering, Ulsan National Institute of Science and Technology, Ulsan, 44919, Republic of Korea.

Summary

Researchers developed a kinetically tailored chemical vapor deposition (KT-CVD) method to synthesize large-area, non-layered 2D molybdenum nitride (MoN) thin films. This breakthrough enables scalable production of advanced 2D materials for novel device applications.

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